Measuring the capacitance of the sensor using an LCR meter.
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What meter is used to measure the capacitance of a capacitor? - Quora
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Schematic of the measurement setup. A LCR meter is connected to the VNA
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Measurement setup for capacitive sensors with a HIOKI 3532-50 LCR
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Measuring the capacitance of the sensor using an LCR meter.
FDC1004: parallel plate capacitor at short distance - Sensors forum - Sensors - TI E2E support forums
What meter is used to measure the capacitance of a capacitor? - Quora
How to Use LCR Meter Correctly?